Corrección de errores del Reglamento Delegado (UE) 2018/1922 de la Comisión, de 10 de octubre de 2018, que modifica el Reglamento (CE) n.° 428/2009 del Consejo, por el que se establece un régimen comunitario de control de las exportaciones, la transferencia, el corretaje y el tránsito de productos de doble uso (DO L 319 de 14.12.2018)
Section | Corrección de errores |
Issuing Organization | Comisión de las Comunidades Europeas |
16.4.2019 ES Diario Oficial de la Unión Europea L 105/67
En la página 129, en la entrada 3B001.f, puntos 3 y 4, la estructura se modifica como sigue:
donde dice:
3. Equipos diseñados especialmente para la fabricación de máscaras, que reúnan todas las características siguientes: a. Un haz de electrones, un haz de iones o un haz “láser”, enfocado y desviable, y
b. Que posean cualquiera de las características siguientes: 1. Un tamaño de anchura de altura media (FWHM) del haz en el impacto (spot) inferior a 65 nm y una colocación de imagen inferior a 17 nm (media + 3 sigma), o
2. Sin uso
3. Un error de recubrimiento de la segunda capa inferior a 23 nm (media + 3 sigma) de la máscara
4. Equipos diseñados para el proceso de dispositivos, utilizando métodos de escritura directa, que reúnan todas las características siguientes: a. Un haz de electrones enfocado y desviable, y
b. Que posean cualquiera de las características siguientes: 1. Un tamaño mínimo del haz inferior o igual a 15 nm, o
2. Un error de recubrimiento inferior a 27 nm (media + 3 sigma)
,
debe decir:
3. Equipos diseñados especialmente para la fabricación de máscaras, que reúnan todas las características siguientes: a. Un haz de electrones, un haz de iones o un haz “láser”, enfocado y desviable, y
b. Que posean cualquiera de las características siguientes: 1. Un tamaño de anchura de altura media (FWHM) del haz en el impacto (spot)...
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